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FFKM · certified grade · default condition

FFKM Semiconductor Grade

Properties of the Semiconductor Grade condition, compared with the other FFKM grades.

Default choice for wafer-fab chamber, gate valve, slit-valve and wet-bench seals where particle generation, plasma erosion and metal-ion contamination matter.

What is FFKM Semiconductor Grade?

FFKM Semiconductor Grade is FFKM in a Semiconductor Grade certified grade — default choice for wafer-fab chamber, gate valve, slit-valve and wet-bench seals where particle generation, plasma erosion and metal-ion contamination matter. FFKM Semiconductor Grade has a tensile strength of 17 MPa (2.47 ksi), weaker than 70% of polymer grades. Elongation at break is 140% and the elastic modulus is 0.01 GPa (0.0016 Msi). FFKM Semiconductor Grade has a density of 2 g/cm³ (0.0723 lb/in³), heavier than 98% of polymer grades. Its glass-transition temperature is -3°C (27 °F).

Advantages

  • High service temperature — 300°C (572 °F), better than 99% of polymer grades
  • Good corrosion resistance — 98/100, better than 99% of polymer grades
  • Good UV / weathering resistance — 95/100, better than 95% of polymer grades

Limitations

  • High embodied carbon — 28 kg CO₂/kg, worse than 100% of polymer grades
  • Heavy — 2 g/cm³ (0.0723 lb/in³), worse than 98% of polymer grades
  • High mold shrinkage — 3.5%, worse than 98% of polymer grades
  • Difficult to machine — 20/100, worse than 97% of polymer grades
  • Low stiffness — 0.01 GPa (0.0016 Msi), worse than 81% of polymer grades

FFKM Semiconductor Grade properties

Typical room-temperature values for FFKM Semiconductor Grade — 6 properties are specific to this condition; the rest are grade-level values shared by every FFKM grade. Each bar shows where the value sits among the polymer grades in FabDigit's library — further right is higher.

Physical3

FFKM Semiconductor Grade has a density of 2 g/cm³ (0.0723 lb/in³), heavier than 98% of polymer grades. Its glass-transition temperature is -3°C (27 °F).

Density2 g/cm³0.07 lb/in³
Glass Transition (Tg)-3°C27 °F
Water Absorption (24 h)0.15%

Mechanical7

FFKM Semiconductor Grade has a tensile strength of 17 MPa (2.47 ksi), weaker than 70% of polymer grades. Elongation at break is 140% and the elastic modulus is 0.01 GPa (0.0016 Msi).

Elastic (Young's) Modulus0.01 GPa0 Msi
Poisson's Ratio0.49
Tensile Strength (Ultimate)17 MPa2.5 ksi
Elongation at Break140%
Hardness, Shore A75 Shore A
Tear Strength18 kN/m103 lbf/in
Compression Set (22 h, 70 °C)12%

Thermal7

FFKM Semiconductor Grade is rated for continuous service to 300°C (572 °F). It conducts heat at 0.22 W/m·K (0.127 BTU/hr·ft·°F), better than 60% of polymer grades. Thermal expansion is 230 µm/m·K (127.8 µin/in·°F).

Thermal Conductivity0.22 W/m·K0.13 BTU/hr·ft·°F
Specific Heat Capacity1,000 J/kg·K0.24 BTU/lb·°F
Thermal Expansion (CTE, 20–100 °C)230 µm/m·K128 µin/in·°F
Max Service Temperature (continuous)300°C572 °F
Min Service Temperature-20°C-4 °F
Flammability (UL 94)Self-extinguishing; fully fluorinated backbone, typically rated V-0 in tested thicknesses
Max Service Temperature (short-term)340°C644 °F

Electrical4

FFKM Semiconductor Grade is an electrical insulator with a dielectric strength of 18 kV/mm (457.2 V/mil) and a resistivity of 1×10¹² Ω·m.

Electrical Resistivity1×10¹² Ω·m3.94×10¹⁹ µΩ·in
Dielectric Strength18 kV/mm457 V/mil
Dielectric Constant (1 MHz)4
Volume Resistivity1×10¹⁴ Ω·cm

Chemical & Environmental3

Corrosion resistance is excellent (98/100), better than 99% of polymer grades. UV resistance is excellent.

Corrosion ResistanceExcellent98/100
UV / Weathering ResistanceExcellent95/100
Chemical Resistance SummaryNear-universal resistance: strong acids and bases, amines, ketones, esters, ethers, hot steam, oxidizing plasmas, fuels and hot hydrocarbons; attacked only by molten alkali metals, elemental fluorine at high temperature and some fluorinated solvents that cause swelling. Rapid gas decompression and cryogenic sealing are the practical limits, not chemistry.

Sustainability3

Producing a kilogram of FFKM Semiconductor Grade takes about 400 MJ of energy and emits 28 kg of CO₂ — more than 100% of polymer grades. Typical recycled content is 0%.

Embodied Energy (primary production)400 MJ/kg171,969 BTU/lb
Embodied Carbon (primary production)28 kg CO₂/kg
Typical Recycled Content0%

Manufacturability3

FFKM Semiconductor Grade's machinability is poor (20/100, worse than 97% of polymer grades).

MachinabilityPoor20/100
Mold Shrinkage3.5%
Mold Temperature (typ.)190°C374 °F

Common Calculations4

Specific Strength (UTS / density)calculated9 kN·m/kg
Specific Stiffness (E / density)calculated0 MN·m/kg
Thermal Diffusivitycalculated0.1 mm²/s
Thermal Shock Resistance Indexcalculated1

Values are nominal handbook figures for design screening. Certified mill or lot data ships with every FabDigit order on request.

Other FFKM grades and fills

FFKM is also supplied in 7 other conditions. The full side-by-side table is on the FFKM overview.

  • Semiconductor GradeDefaultDefault choice for wafer-fab chamber, gate valve, slit-valve and wet-bench seals where particle generation, plasma erosion and metal-ion contamination matter.17 MPa tensile

Working with FFKM Semiconductor Grade

Is FFKM easy to machine?

Not a machining material — parts are net-shape moulded; trimming is done cryogenically or by waterjet, and any secondary cutting must avoid heat and tearing.

Can FFKM be welded?

Cannot be welded; joints are made by co-moulding or bonded splices, and spliced rings lose a large part of the burst/extrusion strength.

Can FFKM be formed, bent or molded?

Compression or injection moulded at roughly 170–205 °C with a long oven post-cure (up to ~305 °C, hours to days) to develop full compression-set and heat resistance; mould shrinkage is high (~3–4 %) so tooling must be scaled per compound.

What surface finishes work on FFKM?

Supplied as-moulded with minimal flash; semiconductor grades are washed/extracted and cleanroom packaged, and no coating or painting is practical on the low-energy fluorinated surface.

FFKM chemical composition (wt %)

Limits by weight percent from the governing specification, written the way the spec states them — a single maximum for impurities, a range for alloying elements, and the base element as balance. Nominal is the typical mid-range value.

ElementSpec limit (wt %)Nominal
tetrafluoroethylene (TFE)backbone comonomer, wt% of polymer50 – 7062
perfluoromethylvinyl ether (PMVE)flexibilising comonomer28 – 4536
cure-site monomer (e.g. perfluoro nitriltriazine or peroxide cross-link site0.3 – 31.5
filler (carbon black, silica, TiO2, BaSOphr in the compound; grade dependent5 – 3015
curative / co-agent package0.5 – 42

FFKM Semiconductor Grade — frequently asked

What is FFKM Semiconductor Grade used for?

FFKM Semiconductor Grade is typically used for semiconductor plasma chamber seals, wafer wet-process O-rings, chemical reactor and valve seals, hot oilfield downhole seals, steam and amine service gaskets and aerospace fuel and hydraulic seals. In short: semiconductor-grade perfluoroelastomer.

What is the tensile strength of FFKM Semiconductor Grade?

FFKM Semiconductor Grade has a typical tensile strength of 17 MPa (2.47 ksi) — weaker than 70% of polymer grades. Strength varies by condition: see the 8 listed tempers.

Is FFKM Semiconductor Grade easy to machine?

Not especially — machinability is rated poor (20/100, worse than 97% of polymer grades). Not a machining material — parts are net-shape moulded; trimming is done cryogenically or by waterjet, and any secondary cutting must avoid heat and tearing.

Can FFKM Semiconductor Grade be welded?

Cannot be welded; joints are made by co-moulding or bonded splices, and spliced rings lose a large part of the burst/extrusion strength.

What surface finishes work on FFKM Semiconductor Grade?

Supplied as-moulded with minimal flash; semiconductor grades are washed/extracted and cleanroom packaged, and no coating or painting is practical on the low-energy fluorinated surface.

Can FFKM Semiconductor Grade be formed, bent or molded?

Compression or injection moulded at roughly 170–205 °C with a long oven post-cure (up to ~305 °C, hours to days) to develop full compression-set and heat resistance; mould shrinkage is high (~3–4 %) so tooling must be scaled per compound.

What is the maximum service temperature of FFKM Semiconductor Grade?

FFKM Semiconductor Grade is rated for continuous use to about 300°C (572 °F), and briefly to 340°C. Strength falls off well before that limit — check the elevated-temperature data for load-bearing parts.

Can FabDigit make parts in FFKM Semiconductor Grade?

Yes — FFKM Semiconductor Grade is available for sheet metal and injection molding with instant online pricing. Upload a STEP file to get a price and a DFM check.

Sources

  1. Kalrez Perfluoroelastomer Parts — product and compound selection dataDuPont (2023)
  2. Chemraz perfluoroelastomer compound datasheetsGreene Tweed (2022)
  3. ASTM D1418 / ASTM D2000 — rubber classification (FFKM)ASTM (2022)
  4. ASTM D412 / D395 / D2240 — tensile, compression set, durometer hardness of elastomersASTM (2021)
  5. ASM Engineered Materials Handbook Vol. 2 — Engineering Plastics/ElastomersASM International (1988)

Property data is compiled from published supplier and standards handbooks and normalised for comparison. Nothing on this page is a certification — request mill certs, CoC or material test reports with your order.